[ China Instrument Network Instrument Development ] On March 22, 2019, the preliminary acceptance meeting of the National Major Scientific Instruments and Equipment Development Project "Development and Application of Cross-Scale Micro-Nanometers" was held at the Shanghai Institute of Metrology and Testing Technology. The meeting was presided over by the Department of Science and Technology of the State Administration of Markets Supervision. Pu Changcheng, chairman of the China Society for Metrology and Testing, served as the leader of the expert group, and the leaders of the Shanghai Municipal Market Supervision Bureau and the Shanghai Municipal Science and Technology Commission attended the meeting.
The “Development and Application of Cross-Scale Micro/Nanometers†project was officially approved by the Ministry of Science and Technology in October 2014. Leaded by Shanghai Measurement Engineering Equipment Supervision Co., Ltd., Shanghai Institute of Metrology and Testing Technology provides technical support. The total funding is 76.81 million yuan, of which the central government special funds are invested 37.31 million yuan. In the end, the project will have an annual production capacity of 50 units and an accumulated sales income of 50 million yuan.
The main content of the project research is to break through many technical bottlenecks in the integrated development of detection methods in the field of micro-nano detection technology in China, and to overcome the key technologies such as multi-axis driving and multi-probe integration, atomic deposition grating based on nano-value traceability. Micro-nanometer for micro-morphology and geometric dimension measurement in metrology, industrial production, product testing, and build a cross-scale, high-precision micro-nano measurement and development platform for China's defense, aerospace, semiconductor manufacturing, MEMS Provide support and guarantee for effective nanometer measurement technology in the fields of industry and air pollutant prevention and control, and improve the technical level of quantitative measurement of micro and nano size in China's high-tech industry.
At present, the project has developed six different types of cross-scale micro-nanometers, which have overcome key technologies such as macro-micro combined multi-axis drive and composite probe integration, atomic deposition grating nano-value traceability, and dual-angle tilt field scan. The dual probes developed by the project—the optical interferometer and the scanning probe microprobe have a nanometer resolution in the vertical direction. Combined with the self-developed cross-scale micro-nanometer software, the height (depth) and surface roughness can be achieved. And flatness measurement function. The results of the project can be applied to aerospace, microelectronics, environmental monitoring and other fields, laying the foundation for improving the measurement capability of micro-nano fields in China.
At the acceptance meeting, the project leader Shao Li, the technical leader, Tongji University Li Tongbao academician and the task leaders made a report on the technical achievements of the project and tasks to the expert group. Based on the preliminary acceptance requirements, the expert group will focus on the acceptance of the project and its tasks. The expert group reviewed the relevant materials and visited the prototype of the project “cross-scale micro-nanometerâ€. After expert inquiry and discussion, the expert group formed acceptance opinions and agreed to approve the project through this acceptance.
(Source: Shanghai Metrology and Testing Institute, State Administration of Markets, Ministry of Science and Technology)
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